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http://hdl.handle.net/20.500.12386/34761
Title: | A nanotechnology application for low energy neutral atom detection with high angular resolution for the BepiColombo mission to Mercury | Authors: | Mattioli, F. Cibella, S. LEONI, Riccardo Orsini, S. Di Lellis, A. M. Selci, S. DE ANGELIS, Elisabetta Rispoli, R. MURA, Alessandro MILILLO, Anna |
Issue Date: | 2011 | Journal: | MICROELECTRONIC ENGINEERING | Number: | 88 | Issue: | 8 | First Page: | 2330 | Abstract: | Thanks to the great progress of micro and nanofabrication techniques, only in recent years it has been possible to propose a space flying instrument able of remote-sensing the surface released neutral particles with a direct technique. This instrument, which will be installed in the BepiColombo/MPO spacecraft to Mercury, is the neutral sensor ELENA (Emitted Low-Energy Neutral Atoms), a time-of-flight (TOF) detector, based on the state-of-the art of ultra-sonic oscillating shutters, and Micro-Channel Plate (MCP) detection. The shuttering system digitizes space and time when tagging the incoming particles without affecting their trajectory and energy. The ELENA shuttering element consists of two self-standing silicon nitride (Si3N4) membranes, one facing the other, patterned with arrays of 200 nm wide nanoslits, organized on a square lattice with 4 μm pitch over a 3 × 3 mm 2 area whereas in the final version it will perform a pitch of 1.4 μm, on a 10 × 10 mm2 area. A capacitive control system is implemented to assure the alignment of the two membranes. The characterization of the shuttering capability has been obtained with a He+ beam at 1 keV. The same fabrication process has been also used to realize a large area mesh filters, in order to reflect unwanted IR radiation to minimize the instrument heat load. © 2011 Elsevier B.V. All rights reserved. | URI: | http://hdl.handle.net/20.500.12386/34761 | URL: | https://www.sciencedirect.com/science/article/pii/S016793171100219X?via%3Dihub https://api.elsevier.com/content/abstract/scopus_id/79960054623 |
ISSN: | 0167-9317 | DOI: | 10.1016/j.mee.2011.02.092 | Fulltext: | open |
Appears in Collections: | 1.01 Articoli in rivista |
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Mattioli_MNE2010_revised.pdf | preprint | 1.46 MB | Adobe PDF | View/Open |
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