CIVITANI, Marta MariaMarta MariaCIVITANIBASSO, StefanoStefanoBASSOPROSERPIO, LauraLauraPROSERPIOGHIGO, MauroMauroGHIGO2019-04-152019-04-152013http://hdl.handle.net/20.500.12386/2134ElettronicoenXOU_BB Prototype: manufacturing steps and analysis of expected alignment performancesTechnical report