Roughness characterization of an SPO sample with AFM: optical side and non-optical side in the inter-rib region

SALMASO, BiancaBiancaSALMASOSPIGA, DanieleDanieleSPIGA2019-04-152019-04-152017http://hdl.handle.net/20.500.12386/2197ElettronicoenRoughness characterization of an SPO sample with AFM: optical side and non-optical side in the inter-rib regionTechnical report