LO CICERO, UGOUGOLO CICEROArnone, ClaudioClaudioArnoneBARBERA, MarcoMarcoBARBERACOLLURA, AlfonsoAlfonsoCOLLURALullo, GiuseppeGiuseppeLulloVARISCO, SalvatoreSalvatoreVARISCO2024-02-282024-02-28200897814244271541082-3654http://hdl.handle.net/20.500.12386/34836Several technologies are presently competing for measuring the temperature increase in cryogenic microcalorimeters used as high resolution energy-dispersive X-ray detectors. Doped germanium, whose resistivity depends on temperature, is a promising material for this purpose, because of its comparatively low specific heat and the possibility of making wafers with high doping uniformity by neutron transmutation. Presently, Ge-based microcalorimeters are still micro-machined and manually assembled. Here we present a planar approach to the fabrication of 2-D arrays of microcalorimeters and show the preliminary technological results. ©2008 IEEE.ELETTRONICOenConference paper10.1109/NSSMIC.2008.47747392-s2.0-67649240264https://api.elsevier.com/content/abstract/scopus_id/67649240264https://ieeexplore.ieee.org/document/4774739FIS/05 - ASTRONOMIA E ASTROFISICAERC sectors::Physical Sciences and Engineering::PE9 Universe sciences: astro-physics/chemistry/biology; solar systems; stellar, galactic and extragalactic astronomy, planetary systems, cosmology, space science, instrumentation::PE9_17 Instrumentation – telescopes, detectors and techniques