AFM analysis of test wafers coated with Cr-Ni-Au layers: roughness characterization

SALMASO, BiancaBiancaSALMASOSPIGA, DanieleDanieleSPIGA2019-04-152019-04-152012http://hdl.handle.net/20.500.12386/2129ElettronicoenAFM analysis of test wafers coated with Cr-Ni-Au layers: roughness characterizationTechnical report