LO CICERO, UGOUGOLO CICEROArnone, ClaudioClaudioArnoneBARBERA, MarcoMarcoBARBERACOLLURA, AlfonsoAlfonsoCOLLURALullo, GiuseppeGiuseppeLullo2024-02-202024-02-2020120022-2291http://hdl.handle.net/20.500.12386/34796In our effort to fabricate arrays of germanium microcalorimeters for X-ray detection, a truncated square-based pyramid shape has been identified as a suitable geometry for the sensors. It allows to obtain a uniform current spreading across each sensor, and represents a good compromise between having a large support area for the radiation absorber and for maintaining an overall small bolometer volume. This three-dimensional geometry, however, does not allow to create the electrical contacts for the sensors using a regular photoresist-based lift-off metallization process. In this paper we show how to deposit metal contacts on the lateral faces of the pyramidal sensors by metal evaporation through a butterfly shaped shadow mask, made of a five microns thick free-standing microstructured copper film. The process to fabricate the shadow mask, using microlithography and electrodeposition techniques, is also described. © Springer Science+Business Media, LLC 2012.STAMPAenArticle10.1007/s10909-011-0418-12-s2.0-84863716031https://link.springer.com/article/10.1007/s10909-011-0418-1https://api.elsevier.com/content/abstract/scopus_id/848637160312012JLTP..167..541LFIS/05 - ASTRONOMIA E ASTROFISICAERC sectors::Physical Sciences and Engineering::PE9 Universe sciences: astro-physics/chemistry/biology; solar systems; stellar, galactic and extragalactic astronomy, planetary systems, cosmology, space science, instrumentation::PE9_17 Instrumentation – telescopes, detectors and techniques