Vernani, D.D.VernaniMazzoleni, FrancescoFrancescoMazzoleniSPIGA, DanieleDanieleSPIGAPARESCHI, GiovanniGiovanniPARESCHICitterio, ObertoObertoCitterio2019-04-152019-04-152005http://hdl.handle.net/20.500.12386/2081ElettronicoenESA Silicon Substrate Microroughness ChracterizationTechnical report