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Fabrication of Electrical Contacts on Pyramid-Shaped NTD-Ge Microcalorimeters Using Free-Standing Shadow Masks

Journal
Date Issued
2012
Author(s)
•
Arnone, Claudio
•
•
•
Lullo, Giuseppe
DOI
Abstract
In our effort to fabricate arrays of germanium microcalorimeters for X-ray detection, a truncated square-based pyramid shape has been identified as a suitable geometry for the sensors. It allows to obtain a uniform current spreading across each sensor, and represents a good compromise between having a large support area for the radiation absorber and for maintaining an overall small bolometer volume. This three-dimensional geometry, however, does not allow to create the electrical contacts for the sensors using a regular photoresist-based lift-off metallization process. In this paper we show how to deposit metal contacts on the lateral faces of the pyramidal sensors by metal evaporation through a butterfly shaped shadow mask, made of a five microns thick free-standing microstructured copper film. The process to fabricate the shadow mask, using microlithography and electrodeposition techniques, is also described. © Springer Science+Business Media, LLC 2012.
Volume
167
Issue
3-4
Start page
541
Uri
Url
Issn Identifier
0022-2291
Ads BibCode
2012JLTP..167..541L
Rights
open.access
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