Probing 3M Trizact abrasive pads in the polishing and super-polishing phase of fused silica
Date Issued
2018
Author(s)
Abstract
The use of 3MTM TrizactTM diamond tiled abrasive pads was proven as a cost-effective pre-polishing technique. Thanks to the low subsurface damages introduced it allows to speed up the polishing phases, reducing the amount of material to be removed. Nowadays, different kind of abrasive pads are available on the market and some of these are dedicated to the last phases of the surface finishing. In this paper, we present the results obtained with 3MTM TrizactTM HookitTM Film Disc 268XA as last step of the polishing phases. The test activity has been carried out on fused silica samples prepared with initial Rq around 50 - 70 nm. In particular, we focused on the wear rate of the pads, the material removal rate and the micro-roughness evolution, in dependence of several parameters as the amount of water, pH, velocity and pressure. The removal rate depends on the status of the abrasive pad and on the polishing conditions, while the micro-roughness of the surface can be decreased well below 1nm rms on millimetre scale. Moreover, a combined process of bonnet pre-polishing followed by 3MTM TrizactTM polishing has been proven as a cost-effective solution to realize super-polished optical surfaces.
Coverage
Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation III
All editors
Navarro, Ramón ; Geyl, Roland
Series
Volume
10706
Start page
107063K
Conferenece
Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation III
Conferenece place
Austin, Texas, United States
Conferenece date
10-15 June, 2018
Issn Identifier
0277-786X
Ads BibCode
2018SPIE10706E..3KC
Rights
open.access
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