Please use this identifier to cite or link to this item:
http://hdl.handle.net/20.500.12386/34796
Title: | Fabrication of Electrical Contacts on Pyramid-Shaped NTD-Ge Microcalorimeters Using Free-Standing Shadow Masks | Authors: | LO CICERO, UGO Arnone, Claudio BARBERA, Marco COLLURA, Alfonso Lullo, Giuseppe |
Issue Date: | 2012 | Journal: | JOURNAL OF LOW TEMPERATURE PHYSICS | Number: | 167 | Issue: | 3-4 | First Page: | 541 | Abstract: | In our effort to fabricate arrays of germanium microcalorimeters for X-ray detection, a truncated square-based pyramid shape has been identified as a suitable geometry for the sensors. It allows to obtain a uniform current spreading across each sensor, and represents a good compromise between having a large support area for the radiation absorber and for maintaining an overall small bolometer volume. This three-dimensional geometry, however, does not allow to create the electrical contacts for the sensors using a regular photoresist-based lift-off metallization process. In this paper we show how to deposit metal contacts on the lateral faces of the pyramidal sensors by metal evaporation through a butterfly shaped shadow mask, made of a five microns thick free-standing microstructured copper film. The process to fabricate the shadow mask, using microlithography and electrodeposition techniques, is also described. © Springer Science+Business Media, LLC 2012. | Note: | This version of the article has been accepted for publication, after peer review (when applicable) and is subject to Springer Nature’s AM terms of use, but is not the Version of Record and does not reflect post-acceptance improvements, or any corrections. The Version of Record is available online at: http://dx.doi.org/10.1007/s10909-011-0418-1 | URI: | http://hdl.handle.net/20.500.12386/34796 | URL: | https://link.springer.com/article/10.1007/s10909-011-0418-1 https://api.elsevier.com/content/abstract/scopus_id/84863716031 |
ISSN: | 0022-2291 | DOI: | 10.1007/s10909-011-0418-1 | Bibcode ADS: | 2012JLTP..167..541L | Fulltext: | open |
Appears in Collections: | 1.01 Articoli in rivista |
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File | Description | Size | Format | |
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LoCicero2011b_postprint.pdf | postprint | 648.01 kB | Adobe PDF | View/Open |
LoCicero2011b - main.pdf | [Administrators only] | 509.32 kB | Adobe PDF |
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