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http://hdl.handle.net/20.500.12386/34818
Title: | Planar Technology for NDT-Ge X-Ray Microcalorimeters: Absorber Fabrication | Authors: | LO CICERO, UGO Arnone, Claudio BARBERA, Marco COLLURA, Alfonso Lullo, Giuseppe Perinati, Emanuele VARISCO, Salvatore |
Issue Date: | 2009 | Volume: | 0094243X | Series: | AIP CONFERENCE PROCEEDINGS | Number: | 1185 | First Page: | 112 | Abstract: | We have investigated the electroplating process to deposit thick uniform films of tin on a Ge wafer coated with Spin-On Glass, in order to fabricate the absorbers for Ge microcalorimeter arrays. Here we discuss some technological details and propose two alternative metal bilayer to be used as seed for the electroplating. | Note: | This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in (AIP Conference Proceedings, 2014) and may be found at (https://doi.org/10.1063/1.3292295). | Conference Name: | THE THIRTEENTH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE DETECTORS—LTD13 | Conference Place: | Stanford, California | Conference Date: | 20–24 July, 2009 | URI: | http://hdl.handle.net/20.500.12386/34818 | URL: | https://api.elsevier.com/content/abstract/scopus_id/74349112765 https://pubs.aip.org/aip/acp/article-abstract/1185/1/112/692628/Planar-Technology-for-NDT-Ge-X-Ray?redirectedFrom=fulltext |
ISSN: | 0094-243X | ISBN: | 9780735407510 | DOI: | 10.1063/1.3292295 | Bibcode ADS: | 2009AIPC.1185..112L | Fulltext: | open |
Appears in Collections: | 3.01 Contributi in Atti di convegno |
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LoCicero2009 - Planar technology for NDT-Ge X-ray microcalorimeters - absorber fabrication.pdf | 321.96 kB | Adobe PDF | View/Open |
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