Planar array technology for the fabrication of germanium x-ray microcalorimeters

Several technologies are presently competing for measuring the temperature increase in cryogenic microcalorimeters used as high resolution energy-dispersive X-ray detectors. Doped germanium, whose resistivity depends on temperature, is a promising material for this purpose, because of its comparatively low specific heat and the possibility of making wafers with high doping uniformity by neutron transmutation. Presently, Ge-based microcalorimeters are still micro-machined and manually assembled. Here we present a planar approach to the fabrication of 2-D arrays of microcalorimeters and show the preliminary technological results. ©2008 IEEE.

Coverage

2008 IEEE Nuclear Science Symposium Conference Record

Start page

1789

Conferenece

2008 IEEE Nuclear Science Symposium Conference Record

Conferenece place

Dresden, Germany

Conferenece date

19-25 October, 2008

Uri

http://hdl.handle.net/20.500.12386/34836

Url

https://api.elsevier.com/content/abstract/scopus_id/67649240264

https://ieeexplore.ieee.org/document/4774739

Issn Identifier

1082-3654

Rights

open.access

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Planar array technology for the fabrication of germanium x-ray microcalorimeters

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